As a Senior Engineer in Photolithography Process Development at Micron, you will be responsible for developing state-of-the-art process modules for memory devices. This involves collaborating with various teams and vendors to meet the device requirements for next-generation semiconductors, integrating processes in cross-functional teams, and ensuring a smooth technology transfer to Micron's global manufacturing network. Additionally, you will work on improving manufacturability and addressing process issues in pilot line manufacturing.
Main Responsibilities
- Develop processes for High Volume Manufacturing (HVM) that meet Process Requirements for CD and overlay, enable other process areas, and are free of defects.
- Continually progress Product Management Improvement (PMI) for part and levels owned.
- Identify maturity roadblocks and work with Process Integration (PI), process areas, and management for solutions.
- Set up and regularly review Statistical Process Control (SPC) charts and scanner data for modules owned.
- Work alongside Manufacturing Development Engineering to improve processes for transfer to HVM, including CpK, cycle time, rework and yield.
- Develop Optical Proximity Correction (OPC) solutions for levels requiring it to meet specifications.
- Engage the Imaging Science team for chemical and simulation problem solving, when required.
- Utilize the Equipment and Overlay teams for resolving issues related to tracks, scanners, and registration.
- Review and verify work by the Scribe team to ensure proper design and layout of frame marks for overlay.
- Work alongside Equipment teams for new tool evaluation and implementation.
- Maintain working relationships with Manufacturing Development Engineering for proper execution in the fab.
- Attend and actively participate in Process Integration module meetings, report results, and propose new actions based on data.
Other Responsibilities
- Support PI with SWR set up in a timely manner and enable automatic execution as much as possible.
- Review Lot/Line Holds and Reworks regularly to ensure smooth flow of material.
- Interact with vendors to solve ongoing issues.
- Maintain coverage and support for Process Development Engineers .
- Transfer owned processes to manufacturing with good support and documentation, using the PMI/PRISM systems.
- Prepare PRD documentation according to transfer schedule and ensure HMV counterpart reviews data for completeness.
- Share ongoing results and conversions to keep R&D and HVM aligned during and after transfer.
- Identify and promptly report safety hazards or safety incidents.
- Follow safety procedures and area work rules, including proper PPE, lockout, and chemical safety.
- Operate and maintain equipment and tools within manufacturers' and company guidelines.
- Work in an ergonomically correct manner and maintain safety certifications in TRAIN.
Job Requirements
Qualifications
- Bachelor’s of Science with at least 8 years of relevant experience, OR
- M.S./Ph.D. in Engineering, Physics, or a relevant area of study to Lithography.
Selection Criteria
- Experience with optics, including the principles and application of immersion lithography, polarized illumination, and low k1 imaging.
- Experience with chemical processes specific to lithography, including materials for 365, 248, and 193nm lithography.
- Understanding of lithography simulation software and application to low k1 imaging.
- Experience with material properties and characterization techniques of lithography.
- Strong aptitude for research and development and ability to create production-worthy technologies.
- Ability to develop and maintain relations with cross-functional teams and vendors.
- Experience with the architectural structure of Micron’s memory products, semiconductor process flows, and steps.
- Understanding of project management tools and techniques.
- Strong communication skills (written, verbal, and presentation).
- Experience in statistics, data analysis, and Design of Experiments (DOE).